sic part
among the material products, cvd-sic is a growth product which can be used as fixtures and components of semiconductor production equipment. sic is the chemical compound composed of a 1:1 combination of silicon and carbon whose hardness ranks the third in the world surpassed only by diamonds and boron carbide.
ferrotec is using silicon and carbon element containing gases for manufacturing, which is also called cvd method. for sic wafer manufacturing, sic is coated over the surface of the plate shaped graphite substrate by cvd. after cutting the outer edges, the graphite substrate is removed by high-temperature oxidation and then several subsequent processes are carried out to manufacture the sic wafer. sic has attracted more attention as a high purity material applied in the energy industry and other most advanced ones as well.
