technical background
（1）ferrotec has been engaged in precise cleaning for 18 years, accumulated a large number of mature cleaning bkm, and continued to improve；
（2）cooperate with world-renowned semiconductor equipment manufacturers to jointly develop leading cleaning technologies；
（3）in the first quarter of 2019, a research and development centre for precision cleaning will be established to enhance the capability of failure analysis and advanced process research and development.
clean environment
（1）cu/non-cu is completely segregated by different production lines to reduce cross-contamination;
（2）segregate cleaning of different processes, dedicated ceramic and quartz cleaning line to reduce pollution；
（3）the clean room adopts vertical flow mode, and the dust-free environment is easier to control；
（4）dry-wet separation is used in clean room to reduce the risk of cross-contamination.
equipment capability
equipment | shanghai factory | dalian factory | tongling factory |
air compressor | oil | oil | oil-free |
cda/n2 | cda | n2(99.999%) | n2(99.999%) |
di water | high-pure diw（>16mω） | ultra-pure diw（>18mω） | ultra-pure diw（>18mω） |
clean room | turbulent circulation（class 1000/class 100） | turbulent circulation（class 1000/class 100） | vertical laminar circulation（class 100/class 10） |
production environment | mixed products | dedicated production line and controllable environment | dedicated production line and controllable environment |
automation | na | introduce automation equipment such as automatic bead blasting, power wash, etc. | introduce automation equipment such as automatic bead blasting, power wash, etc. |
precision measuring equipment
measurement items | measuring equipment | new factory |
surface particle | surface particle meter | 0.1um |
liquid particle | lpc | 0.1um |
key dimensions | cmm | 0.001mm |
aperture | imager | fully automatic, 0.001um |
micro-morphology | keyence | 3000x |
micro-crack | c-sam | cross-sectional scanning |
